ASML is always the first and best-known name when it comes to lithography systems for chip production. But Nikon and Canon are still involved, the latter is now expanding strongly. They want to challenge ASML a little with new technologies, but these remain the only provider at EUV.
Nikon, with barely ten percent of the market, and Canon, which still has a market share of almost 30 percent, only play second fiddle to ASML in lithography systems on paper, but even these are anything but unimportant. Because it not only requires the very best and most expensive systems, which also consume vast amounts of energy, but also smaller equipment and research and development in these areas.
Canon wants to do exactly this with its first new factory building for lithography systems in over 20 years and strive for the increased and broader operational readiness of nanoimprint lithography. It is precisely this that promises not only up to 40 percent lower costs than an EUV system, but also up to 90 percent less energy consumption. Structures that are as small as with EUV should not be able to be created with it, so far there was talk of around 10 nm. Instead of an exposure process, this technology creates nanometer-scale patterns by pressing the pattern mask onto the resin. The system is relatively simple and therefore very compact, which promises the corresponding savings. Kioxia has been trialling these “FPA-1200NZ2C” systems as a sample for NAND fabrication for several years.
A nanoimprint lithography system at Kioxia (Image: Canon)Canon will with the new factory, for which only around 350 million US dollars are to be invested, to double its production capacity in the area in the long term. Construction is scheduled to start next year, and the plant is scheduled to produce from 2025.
The current year shows just how much business is booming. After 140 delivered lithography systems in 2021, 180 systems are to follow this year. However, these are primarily classic DUV scanners and steppers. However, Canon also builds machines known as FPD Lithography Equipment, i.e. intended for the production of flat panel displays (FPDs). The manufacturer also sells around 60 of these systems a year.