ASML and universities to establish Institute for Nanolithography at

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Manufacturer ASML focuses together with the University of Amsterdam and the Free University, the Institute for Nanolithography, which is to deal with lithography on the nanometer scale. In the third quarter to the institute open its doors.

The research institute will in the beginning mainly deal with Extreme Ultraviolet Lithography, ASML, the Dutch manufacturer of wafersteppers, published. Which research programs are to follow, is not yet clear, but considering the name of the institute will be located with lithography on nanometer-scale issues. The institute should be in the third quarter, its doors open and is housed in Amsterdam, but at what location exactly is not yet known.

The largest part of the money for the institute comes from ASML, that in the next ten years 30 million contributes. In addition, ASML also put the UvA and the VU millions, just like the Dutch Foundation for Fundamental Research on Matter and the Netherlands Organisation for Scientific Research. In addition, the city of Amsterdam a grant of 5 million euro for the start of the institute.

In the first few years of the institute under a division of the Foundation for Fundamental Research of Matter fall, but in 2015, the independent. Even so, in addition to Amsterdam, there are the municipalities of Eindhoven, Nijmegen and the German city of Aachen in the race for the institute to accommodate. A spokesman for ASML said compared to the NRC that Amsterdam was chosen because of the well thought-out research agenda with depth and creativity’.